Recently, our company has completed factory acceptance and shipment of the custom LN₂ supply system for MBE (Molecular Beam Epitaxy) equipment for a Russian chip manufacturing enterprise. This cryogenic system provides stable liquid nitrogen supply for compound semiconductor epitaxy production. Equipped with vacuum insulated transfer lines, gas liquid separator, automatic refill valve assembly and multi parameter safety monitoring modules, it eliminates two phase flow disturbance and guarantees stable 77K cryoshroud temperature for MBE ultra high vacuum chamber, supporting 7×24 continuous wafer growth process. The whole system complies with local safety and power supply requirements, marking another key overseas delivery of our domestic cryogenic solution for semiconductor manufacturing.
